case western reserve university

MicroFabrication Laboratory


About the MFL

The Case Microfabrication Laboratory (MFL) is one of the premier academic facilities in the US for the research, development, and prototype fabrication of silicon-based Microelectromechanical Systems (MEMS). The lab is approximately 5500 sq. ft. in size, about half of which is Class 100 cleanroom space. The MFL is professionally staffed and run as an independent cost center under the Electrical Engineering and Computer Science Department.

Visit the Facilities page for more information on the equipment housed in the MFL.