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case western reserve university

MicroFabrication Laboratory

 


Design, fabrication, integration, and test capabilities for both CMOS & non-CMOS devices.

Who We Are

Your Complete Microfabrication Solution
  • Fully equipped facilities for CMOS and non-CMOS processing
  • Professionally staffed and managed

Whats New!

  • Dr. Li Chen appointed MFL Lab Manager. [link]

Tour Our Facility

 

Partners

We are a showroom for Denton Vacuum equipment, providing their customers a chance to see and work with their tools in an operating lab environment.


Environmental Conditioning Systems helps us maintain a constant 69°F and 39% relative humidity at all times in order to produce consistent, high quality photolithography results.